AMX for Maximum Process Control in the Finishing of Advanced Materials

Description

AMX floor standing machines are specifically designed for unique polishing, delayering and planarization applications where R&D, prototype and small volume processing is required.

These machines have the kinematics and control to allow development of processes that require precise material removal, flatness and surface finish generation. The menu-driven microprocessor control allows any polishing, delayering or planarization process to be fully optimized. And, for true CMP kinematics, the oscillation system provides 3-axis motion.

Product description

Live sensor feedback with data capture makes the AMX responsive and capable of maximum process control. Easy to program complex recipes, this unit comes standard with program memory and networking capability.
Depending on the configuration, the AMX machines are excellent for Fine Grinding , Lapping or Polishing of Advanced Materials such as:
• Semiconductor (silicon, germanium, etc.)
• Compound Semiconductor (GaAs, GaN and InP, etc.)
• Electro-Optics (LiNbo3, BBO, etc.)
• Ceramic, Silicon Carbide, Sapphire & Glass
• As well as CMP Polishing

Features

• Real-time spindle and pressure sensor feedback and data acquisition
• User friendly touch panel programmable Graphical Logic Controller
• Fully programmable pressure heads and tool spindles with program save and recall
• Accommodates platen sizes from 15” to 20”
• Integrated slurry dispensing system
• Totally enclosed, fully interlocked working area with easy-open doors
• Floating vacuum-actuated work holder
• Variable Speed Drive (VSDTM)
• Soft-Start Drive (SSDTM) - spin-up/spin-down feature avoids damage to polished components
• Precision cartridge spindle
• Heavy duty ribbed, cast work surface
• Rigid, welded steel base construction
• Corrosion resistant work area with oversize drain for cleanup
• Optional integrated in-process thickness control

	AMX Fine Grinder		AMX Lapper		AMX Polisher
	Platen Drive		25-250rpm, 3HP		3-120rpm, 3HP		3-120rpm, 3HP
	Work Drive		5-150rpm, 1/8HP		3-100rpm, 1/12HP		3-100rpm, 1/12HP
	Work force pressure		5-75 lbs		5-75 lbs		5-100 lbs
	Work force pressure (optional high pressure)		10-200 lbs		10-200 lbs		10-250 lbs
	Platen capacity		15" thru 21" **		15" thru 21" **		15" thru 19" **
	Work oscillation		Optional		Optional		Standard
	Electrical		230VAC		230VAC		230VAC
	Memory		10 recipes, I/O, network capable		10 recipes, I/O, network capable		10 recipes, I/O, network capable